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By Seong H. Kim, Michael T. Dugger, Kash L. Mittal

ISBN-10: 9004190953

ISBN-13: 9789004190955

Phenomena linked to the adhesion interplay of surfaces were a serious point of micro- and nanosystem improvement and function because the first MicroElectroMechanicalSystems(MEMS) have been fabricated. those phenomena are ubiquitous in nature and are found in all structures, despite the fact that MEMS units are relatively delicate to their results as a result of their small dimension and restricted actuation strength which could be Read more...

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Additional resources for Adhesion Aspects in MEMS/NEMS

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L. Liu et al. / Adhesion Aspects in MEMS/NEMS (2010) 45–58 ularities, where the local contact pressure can be very high [5, 6]. Furthermore, the details of the distribution of asperities can also affect the adhesion [7–9]. However, how roughness affects adhesion is still not well understood at a fundamental level.

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Adhesion Aspects in MEMS/NEMS by Seong H. Kim, Michael T. Dugger, Kash L. Mittal


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